NE-PE150F is an industrial production low pressure plasma system, which is mainly composed of vacuum chamber, high frequency plasma power supply, vacuum generation and measurement system, process gas system, control system and so on. The basic principle of the work is to use a vacuum pump to vacuum the studio to a certain vacuum degree, and then pass the process gas. Under the action of a high-frequency generator, a high-frequency alternating electric field is formed between the anode and the cathode, and the gas is ionized to form a plasma. 

Using low temperature plasma to modify the surface of the material is an emerging technology, which improves the surface properties of the material, and has the following advantages : 

( 1 ) Low-temperature plasma has no requirement for the material to be treated. It can treat both metal materials and non-metal materials. 

( 2 ) The low temperature plasma has low energy and only modifies the surface of the material, which will not affect the internal structure of the material and the overall performance of the material. 

( 3 ) Low temperature plasma modification is a dry process, almost does not produce harmful gases or liquids, is a kind of green environmental protection treatment method. 

( 4 ) The low temperature plasma has high efficiency and short treatment time on the surface of the material. 

The low temperature plasma generated by gas discharge is expected to realize the engineering application of material surface modification. The surface modification of the material by low temperature plasma changes the microstructure and chemical composition of the material surface, including the surface chemical composition, wettability and surface microstructure of the material, so as to achieve the purpose of surface modification of the material. The surface chemical composition of the material modified by low temperature plasma changes, and new chemical elements and chemical active functional groups are introduced on the surface of the material. The wettability of the material surface changes, and the hydrophilicity or hydrophobicity increases. The surface morphology of the material changes, and the surface roughness of the material usually increases.